Author: Milky

For decades, MEMS and MOEMS technologies have been considered valuable but peripheral, used primarily in sensors, optics, and specialized signal systems. Their presence in the semiconductor industry was important but often seen as secondary to the ongoing march of transistor scaling. That thinking is beginning to change. During the SPIE lithography conference, Erik Hosler, a consultant with experience in EUV development and advanced patterning, underscored this development by highlighting the growing presence of MEMS and MOEMS in mainstream semiconductor roadmap discussions. Their integration signals a broadening view of what constitutes core technology in the next era of chip innovation.…